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Title: Suspended silicon waveguides for long-wave infrared wavelengths.
Authors: Penadés, J Soler
Sánchez-Postigo, A
Nedeljkovic, M
Ortega-Moñux, A
Wangüemert-Pérez, J G
Xu, Y
Halir, R
Qu, Z
Khokhar, A Z
Osman, A
Cao, W
Littlejohns, C G
Cheben, P
Molina-Fernández, I
Mashanovich, G Z
Issue Date: 2018
Abstract: In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3  dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.
metadata.dc.identifier.doi: 10.1364/OL.43.000795
Appears in Collections:Producción 2020

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